







| Module structure | Horizontal single track | |||
| Module length | Linear segment | 240/480mm | Arc segment | 90°/180°,Radius:234mm |
| Maximum thrust | 285 N | |||
| Continuous thrust | 136 N | |||
| Maximum load | 20 Kg | |||
| Maximum speed | 3 m/s | |||
| Maximum acceleration | 2 g | |||
| Minimum center distance of the mover | 245 mm | |||
| Repeat positioning accuracy | Arc segment | ±0.02 mm | Arc segment | ±0.05 mm |
| Location detection | Absolute value position feedback | |||
| Communication interface | EtherCAT & Ethernet | |||
| Controller/Driver | XiCS-CH/ XiCS-DX | |||
| Controller power supply | 24VDC | |||
| Driver power supply | 55VDC | |||